| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sample data extracting method for performing accurate linear approximation from a measured voltage-current curve (IV data) without respect to the number of the IV data and a measurement interval (density) and to compute a semiconductor characteristic value by using the sample data. SOLUTION: Four or more pairs adjacent to a point giving a current value 0 from a plurality of IV data pair as a pair of a measured current value I and a voltage value V (S130). Using these extracted data pairs, a regression curve is computed, and dispersion in the regression curve is computed (S140), while dispersion in a voltage is computed from the extracted data pairs. A ratio of the voltage dispersion to the regression curve dispersion is computed (S150), and it is identified whether the ratio is not less than a threshold value. If the ratio is the threshold value or more, the extracted data pairs are determined as sample data pairs (S160). Using the sampling data pairs, the characteristic value is computed (S180-190), and consequently, the semiconductor characteristic value is computed.</p> |
