| 摘要 |
PROBLEM TO BE SOLVED: To make a semiconductor light receiving element, the light receiving surface of which is arranged approximately in parallel to the light propagating direction of an optical waveguide on a base plate efficiently receive the propagating light. SOLUTION: The connecting structure of the optical waveguide 16 and the semiconductor light receiving element 12 is provided for detecting the propagating light, which propagates in the optical waveguide 16 having clad parts 13 and 15 formed on the base plate 11 and a core part 14 in the clad parts 13 and 15, with the semiconductor light receiving element 12 arranged in the vicinity of the core part 14 on the bass plate 11 in a way that the light receiving face is in parallel to the core part 14. The semiconductor light receiving element 12 is a surface light receiving type semiconductor light receiving element in which an electrode is arranged on a face which is not opposing to the core part 14. The propagating light is neither scattered nor shielded by the electrode on the light receiving side of the semiconductor light receiving element 12. Further, the generation of the increase in dark current due to stress, the crack of the semiconductor light receiving element 12 and the generation of separation, wrinkle or crack are suppressed because the semiconductor light receiving element 12 is not strongly bent, thus the propagating light is efficiently received. |
