发明名称 METHOD AND APPARATUS FOR MANUFACTURING ZINC OXIDE FILM
摘要 <p>PROBLEM TO BE SOLVED: To provide a method of manufacturing a zinc oxide film which enables effective removal of the zinc nitrate powder produced in a solution during electrodeposition and can simplify the maintenance for this removal system. SOLUTION: The method of manufacturing the zinc oxide film by energizing a conductive substrate 1000 as a cathode immersed into the aqueous solution containing at least nitrate ions and zinc ions and a zinc plate as an anode to each other to electrolytically deposit the zinc oxide film on the conductive substrate 1000, in which the powder of the zinc oxide produced in the solution during the electrolytic deposition is separated by a centrifuge 3001.</p>
申请公布号 JP2003138398(A) 申请公布日期 2003.05.14
申请号 JP20010332854 申请日期 2001.10.30
申请人 CANON INC 发明人 AICHI YASUHIRO;HISAMATSU MASAYA
分类号 C01G9/02;C25D9/08;H01L31/04;(IPC1-7):C25D9/08 主分类号 C01G9/02
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