,申请号JP20020123846-传众专利搜索

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发明名称
摘要
申请公布号	JP3408530(B2)	申请公布日期	2003.05.19
申请号	JP20020123846	申请日期	2002.04.25
申请人		发明人
分类号	C23C18/12;C23C24/08;C23C28/04;H01L21/205;H01L21/31;H01L21/68;H01L21/683;(IPC1-7):H01L21/31	主分类号	C23C18/12
代理机构		代理人
主权项
地址

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