发明名称 METHOD OF MANUFACTURING MATERIAL FOR CERAMIC PACKAGE
摘要 <p>PROBLEM TO BE SOLVED: To easily and surely form a uniform colored layer that is free from color shading on the surface of a sintered AlN compact without compromising the intrinsic high thermal conductivity of AlN. SOLUTION: The colored layer composed of a colored ceramic compound, such as SiC, TaN, etc., is formed on the surface of the sintered AlN compact by a sputtering method.</p>
申请公布号 JP2003158222(A) 申请公布日期 2003.05.30
申请号 JP20020306221 申请日期 2002.10.21
申请人 IBIDEN CO LTD 发明人 INOUE TORU
分类号 C04B41/87;C23C14/34;H01L23/15;(IPC1-7):H01L23/15 主分类号 C04B41/87
代理机构 代理人
主权项
地址