| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress noise of a detection signal caused by linear acceleration or a disturbance acting on a vibrator while minimizing rigidity of a driving vibration arm in a physical quantity measuring device detecting a physical quantity by using the vibrator having a bending vibration arm. <P>SOLUTION: The physical quantity measuring device, for example, a vibrating type gyroscope is provided with the vibrator, a driving means of applying driving vibration to the vibrator, a detecting means of acquiring an output signal based upon detection vibration applied to the vibrator in response to the physical quantity, and a detecting circuit processing the output signal and acquiring a detection signal corresponding to the physical quantity. The vibrator is provided with at least one bending vibration arm 1A and 1B bending and vibrating in a predetermined plane (an X-Y plane). The bending vibration arm is provided with at least one pair of mutually opposing base parts 2A and 2B and a connecting part 3 connecting the base parts 2A and 2B. A pair of recessed parts 8A and 8B is formed by the connecting part 3 and the pair of base parts 2A and 2B. <P>COPYRIGHT: (C)2003,JPO |
