发明名称 WIRING PLATE AND MANUFACTURING METHOD THEREOF, SEMICONDUCTOR MOUNTING SUBSTRATE AND MANUFACTURING METHOD THEREOF, SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a wiring plate excellent in a wiring density, and a semiconductor mounting substrate as well as a semiconductor package which are employing the wiring plate, and the manufacturing method of the wiring plate, the manufacturing method of the semiconductor mounting substrate as well as the manufacturing method of the semiconductor package, which are simplified in a process, low in a cost and high in a connecting reliability. SOLUTION: The wiring plate is provided with an in-layer substrate on which an in-layer wiring is formed, a thin film built-up layer having an adhesive layer and an insulation resin layer at least on one side of the in-layer substrate, and a wiring formed on the insulation resin layer while the wiring and at least the in-layer wiring are connected through via holes. The wiring, formed on the insulation resin layer, is constituted of a spatter metallic layer and a pattern electric plating layer utilizing the spatter metallic layer as a substrate metal. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003174257(A) 申请公布日期 2003.06.20
申请号 JP20010374866 申请日期 2001.12.07
申请人 HITACHI CHEM CO LTD 发明人 URASAKI NAOYUKI;ENDO TOSHIHIRO;TAKAI KENJI;ITO TOYOKI;ARIGA SHIGEHARU;NAKASO AKISHI
分类号 H05K3/42;H01L23/12;H05K3/00;H05K3/46;(IPC1-7):H05K3/46 主分类号 H05K3/42
代理机构 代理人
主权项
地址