发明名称 |
Methods of preventing reduction of IrOx during PZT formation by metalorganic chemical vapor deposition or other processing |
摘要 |
A method of fabricating a ferroelectric capacitor is disclosed. The method comprises the decreases a reduction in a bottom electrode material during formation of the ferroelectric dielectric portion of the capacitor. In the above manner, a fatigue resistance of the ferroelectric capacitor is increased substantially.
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申请公布号 |
US2003119251(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
US20010036827 |
申请日期 |
2001.12.21 |
申请人 |
AGGARWAL SANJEEV;GILBERT STEPHEN R.;SUMMERFELT SCOTT R. |
发明人 |
AGGARWAL SANJEEV;GILBERT STEPHEN R.;SUMMERFELT SCOTT R. |
分类号 |
C23C14/08;H01L21/02;H01L21/314;H01L21/316;(IPC1-7):H01L21/824;H01L21/00 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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