| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus that separates and recovers a halogen compound gas from a mixed gas containing the halogen compound gas with high concentration and high recovery rate and to provide a method using the same. SOLUTION: In the apparatus for separating and recovering the halogen compound gas from the mixed gas which is provided with at least the separation membrane modules at the first stage and the second staged comprising the separation membrane obtained by carbonizing a polymer, the apparatus supplies the mixed gas containing the halogen gas to the gas supply port of the separation module at the first stage, supplies each of the permeated gas of the gas separation membrane module at the pre-stage to the gas supply port of the gas separation membrane modules at the second stage and the subsequent stages, recycles the non-permeated gas of the gas separation membrane modules at the second stage and the subsequent stages to the gas supply port of the gas separation membrane at the first stage and controls the non-permeated gas flow rate of the gas separation membrane module at the first stage by a flow rate control valve connected with the non-permeated gas exit of the gas separation membrane module at the first stage, thereby separating and recovering the halogen compound gas as the non-permeated gas with high concentration and high recovery rate. COPYRIGHT: (C)2003,JPO
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