| 摘要 |
Provided is an acoustic wave device having high strength, wherein a piezoelectric thin film is not prone to cracking or chipping, and a laminated film is not prone to interfacial peeling. The acoustic wave device 1 has a laminated film 13 which is laminated on a support substrate 2. A first support layer 8a is provided so as to surround an area in which IDT electrodes 5a, 5d are provided. A second support layer 8b is provided in an area surrounded by the first support layer 8a. A cover member 9 is fixed on the first and second support layers 8a, 8b so as to close an opening formed by the first support layer 8a. The laminated film 13 is not present in parts, and thus an insulating layer 12 is provided to at least a portion of an area R1 where the laminated film 13 is not present. At least one of the first support layer 8a and the second support layer 8b is provided on the insulating layer 12. |
