PIPE SUPPORT STRUCTURE OF CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide a pipe or the like support structure of a clean room in which influence in the clean room is avoided by preventing pickup of noise occurring from peripheral equipment, or preventing occurrence of a line of magnetic force even if the noise is picked up.

SOLUTION: A support member 30 is formed of a magnetic material. A magnetic closed loop circuit is formed by being connected by the adjacent support member and the magnetic material, or the earth is connected to a deck plate stuck to the support member and a slab 22 inside surface.

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