摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a solar cell which can manufacture a high-performance solar cell at a low cost. <P>SOLUTION: Impurity diffusion regions 4-1, 4-2 of the same conductivity and different impurity concentration with respect to one another are formed on the surface of a semiconductor substrate 1. To this end, liquids 2-1, 2-2 containing impurities to be diffused at the concentrations suitable, respectively, for the regions of the semiconductor substrate 1 for forming the impurity diffusion regions 4-1, 4-2, are applied by an ink jet application method for serving as diffusion sources. Then, a heat treatment is carried out, followed by diffusing the impurities from the diffusion sources 2-1, 2-2 to the individual regions. <P>COPYRIGHT: (C)2003,JPO</p> |