| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a compact and lightweight gas supply unit. <P>SOLUTION: The gas supply unit has a base material 20, two or more fluid control devices, and a flowing passage block 11 attached on the upper face of the base material 20 and the bottom face of the fluid control devices so as to communicate with each of the fluid control devices. One of a plurality of flowing passage blocks has an input port 31, an output port 32, a hermetic filter room 33 formed between the input port 31 and the output port 32, and a filter 34 integrated in the filter room 33. <P>COPYRIGHT: (C)2003,JPO</p> |
