| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enhance heat transfer efficiency by sufficiently thinning the thickness of an insulating film with excellent yield, and to improve sensitivity and responsiveness of a sensor. <P>SOLUTION: A passage 8 for a measuring fluid 7 is formed by a sensor body 2 and a sensor chip 3. A flow velocity detection means 12 and a peripheral temperature detection means 16 are formed on the face on the opposite side to the passage 8 side of the sensor chip 3 through an electrical insulating film 13. The sensor chip 3 is formed from a stainless steel product manufactured by dissolving/casting, by a vacuum induction melting method, a steel ingot dissolved/cast by an ordinary solution process, and by dissolving/casting it again by a vacuum arc remelting method, and the surface thereof is polished. <P>COPYRIGHT: (C)2003,JPO</p> |
