发明名称 |
Power supply, a semiconductor making apparatus and a semiconductor wafer fabricating method using the same |
摘要 |
In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.
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申请公布号 |
US2003162309(A1) |
申请公布日期 |
2003.08.28 |
申请号 |
US20020082160 |
申请日期 |
2002.02.26 |
申请人 |
TAKAHASHI YOUJI;IIDA TSUTOMU;UMEMOTO TSUYOSHI;KASHIBE MAKOTO |
发明人 |
TAKAHASHI YOUJI;IIDA TSUTOMU;UMEMOTO TSUYOSHI;KASHIBE MAKOTO |
分类号 |
G01R31/40;G05F1/10;H01J37/32;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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