| 摘要 |
A gyroscope which comprises: a driving fixed electrode (26) being fixed; a driving displacement electrode (24) being opposite to the driving fixed electrode, and being able to be displaced in a first direction; an inertial mass (23) being connected to the driving displacement electrode (24), being displaced in the first direction according to the first directional displacement of the driving displacement electrode (24), and being displaced in a second direction when an angular rate is applied; a sensing displacement electrode (22) being connected to the inertial mass (23), and being able to be displaced in the second direction according to the second directional displacement of the inertial mass (23); and a sensing fixed electrode (25) being opposite to the sensing displacement electrode and being fixed. The driving displacement electrode (24) is supported by a folded spring (31) movable in the first direction, and the sensing displacement electrode is supported by a folded spring (32) movable in the second direction.
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