| 摘要 |
PURPOSE: An apparatus and method for coating sol-gel are provided to form a uniform thin film on a large-sized ITO electrode. CONSTITUTION: A sol-gel coating apparatus includes a dip coater, a vacuum pump, and a velocity controller. The dip coater is moved on an ITO electrode and performs sol-gel dip coating on the ITO electrode using a sol-gel solution. The vacuum pump makes the coating ambient vacuous. The velocity controller controls the moving velocity of the dip coater. A sol-gel coating method includes a step of cleaning an ITO electrode, a step of processing the surface of the ITO electrode, a step of cleaning the processed ITO electrode and drying the electrode, and a step of coating a sol-gel solution on the ITO electrode in a vacuum state.
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