| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a functional device having a functional layer with a thickness difference between the center part and the end parts in a certain range in which any adverse effect such as color tone unevenness is caused, and to provide an apparatus for producing such a functional device. <P>SOLUTION: In the functional device production method comprising a drying step of drying and solidifying an applied coating liquid after the coating liquid for forming a solvent-containing functional layer is applied to a substrate, in order to level the functional layer to be formed, the shape of the functional layer formed is previously inspected, and if the center part is convex, the evaporation speed of the solvent in the drying step is made high, and if the center part is concave, the evaporation speed of the solvent in the drying step is controlled to be slow. <P>COPYRIGHT: (C)2003,JPO</p> |
