| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink jet head employing a piezoelectric actuator in which positional shift does not cause variation of characteristics readily at the time of connecting a piezoelectric element with a diaphragm and thereby ejection characteristics are stabilized. SOLUTION: A substrate 1 in which pressurized liquid chambers 4 and 4 are formed, a nozzle plate 8, and a diaphragm 6 bonded with a piezoelectric element 7 are stacked. A pressure converting means, i.e., the piezoelectric element 7, does not exist at a position on the supporting substrate side of the diaphragm 6 facing a barrier wall 20 separating the pressurized liquid chambers 4 and 4 in the longitudinal direction. The barrier wall 20 and the piezoelectric element 7 are separated by 100μm or longer so that the pressurized liquid chamber 4 is not deformed even if the position for fixing the piezoelectric element 7 to the diaphragm 6 is shifted from a desired fixing position. COPYRIGHT: (C)2003,JPO
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