GLASS SUBSTRATE MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a glass substrate machining device capable of machining a glass substrate with high machining quality without residual glass powder large enough to damage the glass substrate in coolant to be reutilized and without shortening a filter life. SOLUTION: The glass substrate machining device 10 comprises a substrate finishing machine 100 to grind a glass substrate; various apparatuses to treat coolant fed during grinding; and a circulation flow passage G through which coolant flows in a manner to circulate among the device and apparatuses described above. Various apparatuses to process the coolant includes a centrifugal separator 30, a front stage filter 40 to remove glass powder having a grain size of 3μm or more by filtering coolant where glass powder having a grain size of 10μm is removed by the centrifugal separator 30; and a main filter 60 to filter the coolant are disposed toward downstream from the substrate finishing machine 100. COPYRIGHT: (C)2003,JPO