| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a production management method which reduces the number of times and processing time of a dummy run, improves the operating speed of a device, shortens lead time of a lot, and reduces the cost by reducing dummy wafer used for the dummy run. <P>SOLUTION: On a production device which processes a plurality of production processes, which have different process conditions in one processing room, a pollution level, which is an indicator of the degree of the pollution of a product or a production device in a production process, is preset, the pollution level of the product or the production device in the production process after processing the product is set and recorded in the first storage; a plurality of products, whose pollution levels recorded in the first storage are same, are grouped as one pollution group; the products are recorded in the second storage by the pollution group; and the execution of the process in the production process is directed for each pollution group recorded in the second storage. <P>COPYRIGHT: (C)2004,JPO</p> |
