| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a position detecting apparatus having a simple configuration and having excellence in both positional resolution and uniformity of an energy signal. <P>SOLUTION: The position detecting apparatus 1, which detects a one- dimensional light incident position on the light receiving surface of a photodetector 110, comprises a resistor chain circuit 120, a first calculating unit 130, a second calculating unit 140, and a position calculating unit 170 in addition to the photodetector 110. The resistor chain circuit 120 includes (M-3) resistors R<SB>2</SB>to RM<SB>-2</SB>. These (M-3) resistors R<SB>2</SB>to RM<SB>-2</SB>are cascaded, among which a resistor R<SB>m</SB>is provided between an output terminal P<SB>m</SB>and an output terminal P<SB>m+1</SB>of the photodetector 110, wherein m is each integer no fewer than 2 and no more than (M-2). <P>COPYRIGHT: (C)2004,JPO</p> |
