| 发明名称 |
METHOD FOR MAKING FOREIGN MATTER HARMLESS |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for making foreign matter harmless by which foreign matter present in the transmission region of a pellicle attached reticle can be made harmless without detaching the pellicle. <P>SOLUTION: In the method for making foreign matter harmless, foreign matter present in the transmission region of a pellicle attached reticle is made harmless by irradiation through the pellicle membrane with laser light of a wavelength which passes through the pellicle membrane. <P>COPYRIGHT: (C)2004,JPO</p> |
| 申请公布号 |
JP2003302745(A) |
申请公布日期 |
2003.10.24 |
| 申请号 |
JP20020111261 |
申请日期 |
2002.04.12 |
| 申请人 |
DAINIPPON PRINTING CO LTD |
发明人 |
KOIZUMI YASUHIRO;TSUCHIYA KATSUHIDE |
| 分类号 |
G03F1/62;G03F1/72;G03F7/20;H01L21/027;(IPC1-7):G03F1/08;G03F1/14 |
主分类号 |
G03F1/62 |
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