发明名称 Electrodes for ferroelectric components
摘要 A ferroelectric integrated circuit including a substrate supporting a thin film ferroelectric material and an electrode layer in contact with the ferroelectric material, the ferroelectric material comprising a compound including a metal element, the electrode comprising the metal element. The metal element of the ferroelectric material may exist in the electrode in the pure metal form, as an alloy, as part of a crystalline compound, or as part of an amorphous material. The electrodes may be formed by a single layer, or as multi-layer structures, providing the layer adjacent the ferroelectric contains at least one of the metal elements of the ferroelectric. The electrode is formed at the eutectic temperature of its constants.
申请公布号 US2003201475(A1) 申请公布日期 2003.10.30
申请号 US20020133516 申请日期 2002.04.26
申请人 UCHIYAMA KIYOSHI;TANAKA KEISUKE 发明人 UCHIYAMA KIYOSHI;TANAKA KEISUKE
分类号 H01L21/02;H01L21/285;(IPC1-7):H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L21/02
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