| 发明名称 |
METHOD FOR DISCRIMINATING DETERIORATION OF PELLICLE MEMBRANE AND PELLICLE MEMBRANE THEREFOR |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for discriminating deterioration of a pellicle membrane capable of accurately judging the degree of deterioration of a pellicle membrane by an easy inspection and to provide a pellicle membrane therefor. <P>SOLUTION: In the method for discriminating deterioration of a pellicle membrane, a pattern 13 formed on a pellicle membrane 10 is measured with a discriminator and deterioration of the pellicle membrane 10 is discriminated from the measured result. <P>COPYRIGHT: (C)2004,JPO</p> |
| 申请公布号 |
JP2003315982(A) |
申请公布日期 |
2003.11.06 |
| 申请号 |
JP20020124079 |
申请日期 |
2002.04.25 |
| 申请人 |
OKI ELECTRIC IND CO LTD;MIYAZAKI OKI ELECTRIC CO LTD |
发明人 |
KUWABARA TAKAYUKI |
| 分类号 |
G03F1/62;H01L21/027;(IPC1-7):G03F1/14 |
主分类号 |
G03F1/62 |
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