| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for mark recognition which can recognize a mark on an object such as a substrate with high precision. <P>SOLUTION: An image read means reads the substrate mark (S1) and the read substrate mark is compared with a plurality of model templates in order (S4 to S7) to select a model template which is suitable to the read substrate mark (S9, S10). When a substrate is actually produced, an image of a substrate mark is matched against the selected model template which is thus selected to recognize the substrate mark. In this constitution, the template matching is carried out by using the ideal template corresponding to the mark to be recognized, so the precision of the matching processing is improved to enable high-precision mark recognition. <P>COPYRIGHT: (C)2004,JPO |
