| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film resistance element capable of reducing the variation of the resistance of its thin film made of tantalum nitride which is caused by its heat process, and to provide a silicon optical bench having the same mounted resistance element, a laser diode module, and a manufacturing methods thereof. <P>SOLUTION: In the thin-film resistance element, a tantalum nitride thin film 21 to be an electrical resistance is so formed on a silicon substrate 2 having an oxide film 3 on its surface as to connect thin-film electrodes 14, 15 with the thin film 21. Further, in the thin-film resistance element, a nitride thin film 18 is formed between the oxide film 3 and the tantalum nitride thin film 21. <P>COPYRIGHT: (C)2004,JPO</p> |
