Method for manufacturing wafer-level fan-out package

摘要

Provided are a semiconductor package and a method for manufacturing a semiconductor package. The method for manufacturing a wafer-level fan-out package includes attaching semiconductor chips sawed to have a predetermined size to one surface of a wafer at predetermined intervals, forming a first passivation layer on surfaces of the semiconductor chips and the wafer, forming a redistribution layer electrically connected to the semiconductor chips on portions of an upper surface of the first passivation layer, forming a second passivation layer on the upper surface of the first passivation layer and surfaces of portions of the redistribution layer, forming external connection terminals on portions of the redistribution layer in which the second passivation layer has not been formed, and performing sawing along package boundary lines (sawing lines) and polishing the wafer to be removed such that lower surfaces of the semiconductor chips are exposed.

主权项

1. A method for manufacturing a wafer-level fan-out package, the method comprising:
attaching semiconductor chips sawed to have a predetermined size to one surface of a wafer at predetermined intervals; forming a first passivation layer on surfaces of the semiconductor chips and the wafer; forming a redistribution layer electrically connected to the semiconductor chips on portions of an upper surface of the first passivation layer; forming a second passivation layer on the upper surface of the first passivation layer and surfaces of portions of the redistribution layer; forming external connection terminals on portions of the redistribution layer in which the second passivation layer has not been formed; and performing sawing along package boundary lines and polishing the wafer to be removed such that lower surfaces of the semiconductor chips are exposed.