| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable a liquid jetting head which uses piezoelectric elements each having a multilayered structure to be improved in manufacturing efficiency. <P>SOLUTION: An element manufacturing process is composed of a first process of forming a common lower electrode on the surface of a ceramic sheet 18, a second process of laminating a lower piezoelectric material on the common lower electrode, a third process of laminating a drive electrode on the lower piezoelectric material, a fourth process of laminating an upper piezoelectric material on the lower piezoelectric material so as to cover the drive electrode, and a fifth process of forming an upper common electrode on the surface of the upper piezoelectric material. The electrodes formed in the first, second, and third processes are each provided in a formation range R that is set inside a chip region 19. <P>COPYRIGHT: (C)2004,JPO</p> |
