| 摘要 |
PURPOSE: A structure for preventing oil leakage of a vacuum pump is provided to effectively prevent oil from flowing into pump chambers of a vacuum pump absorbing gas. CONSTITUTION: A vacuum pump absorbs gas by operating gas carrying bodies(23-32) of pump chambers(39-43) through rotation of rotary shafts(19,20). The vacuum pump includes oil housing members(14,33), stoppers, and tapered cylinder surfaces. The oil housing members form an oil area(331) adjacent to the pump chambers. Rotary shafts(19,20) have protruded sections protruded toward the oil area from the pump chambers through the oil housing members. The stoppers have sectional surfaces and are placed on the rotary shafts to rotate integratedly with the rotary shafts to prevent oil from flowing into the pump chambers. The tapered cylinder surfaces are placed around axial lines(191,201) of the rotary shafts. The tapered cylinder surfaces are adjacent to the sectional surfaces of the stoppers, closer to the oil area than the sectional surfaces. The tapered cylinder surfaces are formed to increase a distance between cylinder surfaces and the axial lines of the rotary shafts to a side close to the oil area from a side close to the pump chambers.
|
