INDUSTRIAL ROBOT INCLUDING HAND PART HAVING PARTICLE COUNTER IN CLEAN SPACE

摘要

PURPOSE: An industrial robot is provided to accurately and quickly measure an amount of particles nearby a semiconductor wafer or a liquid panel fixed on a hand part of the robot within a clean space by arranging a particle counter on the hand part of the robot. CONSTITUTION: An industrial robot(1) performing works such as assembling, machining, and carrying includes a hand part(10) having a particle counter in a clean space(11). The particle counter measures cleanness of the clean space(11). An intake hole is positioned at a front end part of the particle counter. The particle counter counts particles based on the scattered light generating the particles in a measurement area projected by a laser beam.