| 发明名称 |
Method of manufacturing a ferroelectric thin film |
| 摘要 |
The invention provides a method for forming a ferroelectric thin film that is uniform and good in crystallinity. The method includes applying a liquid to a surface of a substrate. The liquid includes ultra-fine particle powder comprising at least one element constituting the ferroelectric thin film to a surface of a substrate. The liquid applied to the surface of substrate is then baked.
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| 申请公布号 |
US6740532(B2) |
申请公布日期 |
2004.05.25 |
| 申请号 |
US20020218988 |
申请日期 |
2002.08.13 |
| 申请人 |
ROHM CO., LTD. |
发明人 |
FUJIMORI YOSHIKAZU |
| 分类号 |
C23C14/58;H01L21/02;H01L21/28;H01L21/314;H01L21/316;H01L21/8246;H01L21/8247;H01L27/105;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/00 |
主分类号 |
C23C14/58 |
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