| 摘要 |
This invention is an exposure apparatus with an environmental control chamber for forming a closed space. An air conditioning device for circulating air in the closed space along a predetermined course of flow path. A main body of an exposure device which is disposed in a closed space formed by the environmental control chamber at a predetermined position along the predetermined course of flow path from the air conditioning device and exposes a substrate with a predetermined pattern. A heat-discharging box disposed in the environmental control chamber at least on the downstream side of the flow path from the main body of the exposure device and accommodating a first heat source which is detachable from the main body of the device.
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