发明名称 Memory cell and method for forming the same
摘要 A semiconductor memory cell structure and method for forming the same. The memory cell is formed on a surface of a substrate and includes an active region formed in the substrate, an epitaxial post formed on the surface of the substrate over the active region. The epitaxial post has at least one surface extending outwardly from the surface of the substrate and another surface opposite of the surface of the substrate. A gate structure is formed adjacent to at least a portion of all the outwardly extending surfaces of the epitaxial post, and a capacitor formed on an exposed surface of the epitaxial post.
申请公布号 US6756625(B2) 申请公布日期 2004.06.29
申请号 US20020177228 申请日期 2002.06.21
申请人 MICRON TECHNOLOGY, INC. 发明人 BROWN KRIS K.
分类号 H01L21/02;H01L21/336;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L29/76;H01L29/94;H01L31/119 主分类号 H01L21/02
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