| 摘要 |
PURPOSE: An ion beam generator is provided to allow an insulating bushing to be accurately and easily coupled to a guide pin by arranging a guide plate to a liner. CONSTITUTION: An ion beam generator comprises a beam line well(10) applied with a high voltage for generating ion beams, wherein the beam line well has an opening; a liner(12) arranged in the beam line well, and which has a guide pin(13) protruded from a flange; an insulating bushing inserted into the guide pin of the liner, and which has a hole; a source head housing inserted through the hole of the insulating bushing and the opening of the beam line well, wherein the source head housing has a flange coupled to the insulating bushing; a source head accommodated in the source head housing; and a guide plate(14) arranged on the flange of the liner, and which partially covers and guide the outer surface of the lower portion of the insulating bushing.
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