| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillatory actuator, with improved high-speed performance which can be positioned with accuracy, even in jogging. <P>SOLUTION: The oscillatory actuator uses ultrasonic motors designed so that oscillating bodies are caused to produce ultrasonic vibration and movable bodies are relatively moved via frictional members by the ultrasonic vibration. In the actuator, the ultrasonic motors are disposed in a plurality of stages via the movable bodies, and the actuator is provided with a controller which controls the driving of the ultrasonic motors. The ultrasonic motors are individually controlled by the controller. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
