| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a three-dimensional fine production method where a metallic extra fine tube with an outside diameter of 500 μm and a thickness of ≥5 μm can be produced by using a sputtering deposition method. <P>SOLUTION: The ionized particles of rare gas such as argon are collided against a target material 4 of titanium or the like having suitable mechanical properties and excellent corrosion resistance and the target particles 3 are sputtered from the surface. A substrate 5 (core material) is rotated at 1 to 5 rpm by a motor 2 controlled by a DC motor control fixed to a substrate holder 1. The target material 4 is deposited on the core material 5 having a thermal expansion coefficient close to that of the target material 4, and after heat treatment, the core material 5 is corroded to obtain an extra fine tube shape. By the changes in the outside diameter and shape of the core material 5, the inside diameter and hollow shape of the extra fine tube are made controllable to realize the production of a three dimensional shape such as an extra fine tube by the deposited target material 4. Further, a material excellent in corrosion resistance and a tube friction coefficient is film-deposited before a rare metal is film-deposited on the substrate (core material), so that an extra fine tube having reduced friction in the tube, improved wettability and excellent corrosion resistance is produced. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
