发明名称 |
CHEMICAL AMPLIFICATION-TYPE PHOTOSENSITIVE COMPOSITION, IMAGE FORMING MATERIAL AND METHOD FOR FORMING IMAGE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical amplification photosensitive composition which is suitable for a laser direct drawing and attains stable image formation with high sensitivity. <P>SOLUTION: The chemical amplification-type photosensitive composition contains: (a) alkali-soluble resin; (b) a compound expressed by general formula (I) as a light absorbent; and (c) an N-hydroxyimide ester of sulfonic acid as an acid generating agent. In general formula (I), each of Q<SP>1</SP>to Q<SP>3</SP>independently represents an oxygen atom or a sulfur atom, each of R<SP>1</SP>and R<SP>2</SP>independently represents a hydrogen atom, an aliphatic group which may be substituted, an aromatic group which may be substituted or a heterocyclic group which may be substituted. The substituent group necessary to prepare the compound expressed by general formula (I) as a light absorbing agent is represented by [=X(Z<SP>1</SP>)Z<SP>2</SP>]. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
申请公布号 |
JP2004240120(A) |
申请公布日期 |
2004.08.26 |
申请号 |
JP20030028515 |
申请日期 |
2003.02.05 |
申请人 |
MITSUBISHI CHEMICALS CORP |
发明人 |
MIZUHO YUUJI;TOSHIMITSU ERIKO |
分类号 |
G03F7/031;G03F7/038;G03F7/039;H01L21/027 |
主分类号 |
G03F7/031 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|