发明名称 CHEMICAL AMPLIFICATION-TYPE PHOTOSENSITIVE COMPOSITION, IMAGE FORMING MATERIAL AND METHOD FOR FORMING IMAGE
摘要 <P>PROBLEM TO BE SOLVED: To provide a chemical amplification photosensitive composition which is suitable for a laser direct drawing and attains stable image formation with high sensitivity. <P>SOLUTION: The chemical amplification-type photosensitive composition contains: (a) alkali-soluble resin; (b) a compound expressed by general formula (I) as a light absorbent; and (c) an N-hydroxyimide ester of sulfonic acid as an acid generating agent. In general formula (I), each of Q<SP>1</SP>to Q<SP>3</SP>independently represents an oxygen atom or a sulfur atom, each of R<SP>1</SP>and R<SP>2</SP>independently represents a hydrogen atom, an aliphatic group which may be substituted, an aromatic group which may be substituted or a heterocyclic group which may be substituted. The substituent group necessary to prepare the compound expressed by general formula (I) as a light absorbing agent is represented by [=X(Z<SP>1</SP>)Z<SP>2</SP>]. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004240120(A) 申请公布日期 2004.08.26
申请号 JP20030028515 申请日期 2003.02.05
申请人 MITSUBISHI CHEMICALS CORP 发明人 MIZUHO YUUJI;TOSHIMITSU ERIKO
分类号 G03F7/031;G03F7/038;G03F7/039;H01L21/027 主分类号 G03F7/031
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