| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma sterilizing device that can efficiently generate plasma and, at the same time, can perform continuous sterilization. <P>SOLUTION: This plasma sterilizing device is constituted to form a long vertical creeping discharge passage 11 between lattice-like electrodes 7 by successively arranging facial electrodes 3, dielectrics 5, and the lattice-like electrodes 7 in this order. A gas inlet port 13 for introducing a process gas and a gas outlet port 15 are respectively provided above and below the creeping discharge passage 11 and plasma is spouted from the gas outlet port 15 together with an activated gas. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
