发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem that a thin wafer cannot be pasted to a dicing sheet because a conventional adhesive film hardens partially to cause warpage of the thin wafer when the adhesive film is pasted to collective electronic components on the thin wafer. <P>SOLUTION: Under a temperature not lower than the melting point of an adhesive film and not higher than the reaction start point, the adhesive film is pasted to thin collective electronic components and then thin electronic components are diced thus preventing the thin electronic component from warping after the adhesive film is pasted. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2004311603(A) |
申请公布日期 |
2004.11.04 |
申请号 |
JP20030100962 |
申请日期 |
2003.04.04 |
申请人 |
NAGASE & CO LTD |
发明人 |
TAKAHASHI ATSUSHI;ISHIDA YOSHIHIRO |
分类号 |
H01L21/60;H01L21/301;H01L21/52 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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