发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve a problem that a thin wafer cannot be pasted to a dicing sheet because a conventional adhesive film hardens partially to cause warpage of the thin wafer when the adhesive film is pasted to collective electronic components on the thin wafer. <P>SOLUTION: Under a temperature not lower than the melting point of an adhesive film and not higher than the reaction start point, the adhesive film is pasted to thin collective electronic components and then thin electronic components are diced thus preventing the thin electronic component from warping after the adhesive film is pasted. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004311603(A) 申请公布日期 2004.11.04
申请号 JP20030100962 申请日期 2003.04.04
申请人 NAGASE & CO LTD 发明人 TAKAHASHI ATSUSHI;ISHIDA YOSHIHIRO
分类号 H01L21/60;H01L21/301;H01L21/52 主分类号 H01L21/60
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