| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a scanning optical microscope which employs a wave front converting element, has little off-axis performance deterioration and exerts little influence on an object to be observed. <P>SOLUTION: The scanning optical microscope is equipped with a light source 11, the wave front converting element 2 which optionally converts the wave front of the illumination light emitted by the light source, a luminous flux scanning means 3 which makes a scan with the wave front-converted illumination light from the wave front converting element 2 in mutually orthogonal directions, an objective lens 4 which converges the illumination light whose direction is changed by the luminous flux scanning means 3 on the object O, and a detector 53 which detects signal light emitted by the object O; and the optical element which is closest to the object among the objective lens 4 has its position fixed with respect to the object, the objective lens 4 includes a lens moving toward and away from the object, and the wave front converting element 2 is modulated in synchronism with the movement. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
