发明名称 Enhancement, stabilization and metallization of porous silicon
摘要 A post-etch treatment for enhancing and stabilizing the photoluminescence (PL) from a porous silicon (PS) substrate is outlined. The method includes treating the PS substrate with an aqueous hydrochloric acid solution and then treating the PS substrate with an alcohol. Alternatively, the post-etch method of enhancing and stabilizing the PL from a PS substrate includes treating the PS substrate with an aqueous hydrochloric acid and alcohol solution. Further, the PL of the PS substrate can be enhanced by treating the PS substrate with dye. Furthermore, the PS substrate can be metallized to form a PS substrate with resistances ranging from 20 to 1000 ohms.
申请公布号 US6828253(B2) 申请公布日期 2004.12.07
申请号 US20030453573 申请日期 2003.06.03
申请人 GEORGIA TECH RESEARCH CORPORATION 发明人 GOLE JAMES L.;SEALS LENWARD T.
分类号 B32B5/18;H01L21/288;H01L21/302;H01L21/306;H01L21/461;(IPC1-7):H01L21/302 主分类号 B32B5/18
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