PHOTODETECTOR USING LATERAR OPTICAL CONFINED WAVEGUIDE AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A photodetector and fabricating method thereof are provided to reduce the number of photo-lithography processes by changing a refractive index of a partial region of an optical waveguide without performing a deep etching process and a planarization process. CONSTITUTION: An optical waveguide(100) includes a first waveguide region(110) and a second waveguide region(120) to obtain lateral binding power. The second waveguide region is formed at both sides of the first waveguide region. A refractive index of the second waveguide is lower than a refractive index of the first waveguide. A photodiode(200) is formed on the optical waveguide. The photodiode includes an optical absorbing layer(210), a window layer(220), and an active region(230).