METHOD FOR FORMING SOG LAYER HAVING UNIFORM DENSITY

摘要

PURPOSE: A method for forming an SOG(Spin-On-Glass) layer having uniform density is provided to improve the density of the SOG layer and reduce generation of cracks by applying vibration to the vertical direction of the substrate in a process for forming the SOG layer. CONSTITUTION: An SOG layer is deposited on a surface of a substrate. The substrate including the SOG layer is vibrated to the vertical direction(S2). The process for vibrating the substrate is performed by applying high-frequency of 100 to 50,000Hz to the substrate. The process for vibrating the substrate is performed during 10 to 600 seconds.