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发明名称
Method for correcting surface shape
摘要
A method for correcting a surface shape includes the steps of scraping a multilayer film formed on the substrate's surface of an optical element, and correcting the surface shape of the optical element by detecting the amount of scraping.
申请公布号
US2004256047(A1)
申请公布日期
2004.12.23
申请号
US20040870277
申请日期
2004.06.17
申请人
SEKINE YOSHIYUKI
发明人
SEKINE YOSHIYUKI
分类号
G02B5/08;G02B7/182;G03F7/20;G21K1/06;H01L21/027;(IPC1-7):B32B31/00;B32B35/00
主分类号
G02B5/08
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代理人
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