发明名称 Multi-axis interferometer
摘要 A multi-axis interferometer includes a mounting block with first and second polarizing beam-splitter cubes contacting first and second faces of the mounting block. A beam-distribution system contacts a third face of the mounting block. The beam-distribution system is thus placed in optical communication with the first polarizing beam-splitter cube and the second polarizing beam-splitter cube.
申请公布号 US6836335(B2) 申请公布日期 2004.12.28
申请号 US20020190752 申请日期 2002.07.08
申请人 ZYGO CORPORATION 发明人 HILL HENRY A.;CARLSON ANDREW ERIC;DE GROOT PETER J.
分类号 G01B9/02;(IPC1-7):G01B9/02;G01B11/00;G01B9/21;G01C19/72;F16M1/00 主分类号 G01B9/02
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