| 摘要 |
PURPOSE: A bit of equipment for manufacturing a semiconductor device is provided to check easily the cause of malfunction in the equipment and to prevent various problems due to the decrease of flow rate by checking the flow rate of a cooling line at any time using a flow rate measuring part. CONSTITUTION: A bit of equipment for manufacturing a semiconductor device includes a reaction chamber(100) heated by a heating part, a controller for controlling the heating part and a cooling part(300) for cooling the reaction chamber. The cooling part includes a cooler, a cooling water supply line(310), a flow rate controlling valve, a flow rate measuring part and a display part(560). The cooler supplies a cooling water to the cooling water supply line and controls temperature of the cooling water. The cooling water supply line includes a cooling pipe arranged at a periphery of the reaction chamber. The flow rate controlling valve is installed on the cooling water supply line. The flow rate measuring part(520) is used for measuring the flow rate of the cooling water supply line.
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