PHOTO TRACK DEVICE CAPABLE OF SHIELDING WAFER FROM RADIATION OF HOT PLATE USING ELEVATOR AND HEAT BLOCKING PLATE AND CONTROLLING METHOD THEREOF

摘要

PURPOSE: A photo track device and a controlling method thereof are provided to improve the stability of processes by shielding a wafer from the radiation of a hot plate using an elevator and a heat blocking plate. CONSTITUTION: A photo track device includes a hot plate, an elevator, a support part and a heat blocking plate. The hot plate(8) generates heat to bake a wafer(14). The elevator(10a,10b) moves the wafer up and down. The support part(12a,12b) is installed at a lower portion of the elevator to support and fix the wafer. The heat blocking plate(16) is installed between the wafer and the hot plate.