POLISHING PAD CONDITIONING METHOD FOR IMPROVING LIFETIME OF POLISHING PAD AND REMOVING COMPLETELY SLURRY FROM GROOVES OF POLISHING PAD

摘要

PURPOSE: A polishing pad conditioning method is provided to improve the lifetime of a polishing pad by conditioning the polishing pad using a brush and to remove completely slurry from grooves of the pad by spraying water onto the pad. CONSTITUTION: A surface of a polishing pad(1) is scrubbed by using a plurality of brushes(21) with a predetermined diameter while a nozzle(23) over the polishing pad sprays water onto the polishing pad. Water spraying pressure is larger 5 times or more than atmospheric pressure. Each brush is made of polyurethane and has a diameter of 30 m or less.