METHOD OF MANUFACTURING INDUCTOR WITH SHIELD LAYER FOR IMPROVING EFFICIENCY OF INDUCTOR

摘要

PURPOSE: A method of manufacturing an inductor is provided to improve the efficiency of the inductor by forming a shield layer used as an active layer between the inductor and a silicon substrate. CONSTITUTION: A pad nitride pattern and a pad oxide pattern are sequentially formed on a substrate(100). A plurality of round trenches are formed in the substrate by performing wet-etching using the pad nitride pattern as an etching mask. Oxide is filled in the trenches. A salicide barrier pattern for exposing the filled oxide to the outside is formed thereon. An active shield layer(116) is completed by forming salicide on the filled oxide.